| 000 | 00368nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 180611s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a0-8247-6068-9 | ||
| 041 | _aen | ||
| 082 | _a621.55 | ||
| 100 | _aDILLON, John A. | ||
| 245 | 0 | _aExperimental Vacuum Science and Technology | |
| 260 |
_aNew York. _bMarcel Dekker, Inc. _c1973 |
||
| 300 | _axxii, 237p | ||
| 942 | _cLL | ||
| 999 |
_c9885 _d9885 |
||