| 000 | 00356nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 180612s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a70370567 | ||
| 041 | _aen | ||
| 082 | _a621.381 | ||
| 100 | _aHong Lee H | ||
| 245 | 0 | _aFundamentals of microelectronics processing | |
| 260 |
_aNew York : _bMcGraw-Hill, _c1990 |
||
| 300 | _axvi, 514 p | ||
| 942 | _cPR | ||
| 999 |
_c53797 _d53797 |
||