000			00345nam a2200145Ia 4500
008			180612s9999||||xx |||||||||||||| ||und||
020			_a750304952
041			_aen
082			_a621.55
100			_aCHAMBERS,A.
245		0	_aBasic vacum Technology
260			_aBoston. _bInstitute of Physics pub. _c1998
300			_axiv,189p.
942			_cPR
999			_c50148 _d50148