000			00352nam a2200145Ia 4500
008			180612s9999||||xx |||||||||||||| ||und||
020			_a70370567
041			_aen
082			_a621.381
100			_aHong H
245		0	_aFundamentals of microelectronics processing
260			_aNew York : _bMcGraw-Hill, _c1990
300			_axvi, 514 p
942			_cPR
999			_c40150 _d40150