000			00321nam a2200133Ia 4500
008			180611s9999||||xx |||||||||||||| ||und||
041			_aen
082			_a153.83
100			_aCHAMBERS,A.
245		0	_aBasic vacum Technology
260			_bBoston. Institute of Physics _cpub. 1997
300			_a153.83
942			_cLL
999			_c12742 _d12742